World-class flatness measurements thanks to the high-precision air slider, linear servomotor and other devices made by using Kuroda’s ultra-precision processing technology.
From the experience accumulated by selling the NANOMETRO® series, Kuroda equipped this instrument with various visualization and analysis software programs developed in house to assess measurements in an optimal way.
Supports workpieces made of a variety of materials, such as metals, ceramics, glass, and all sorts of wafers. The measuring head is designed exchangeable in accordance with the required assessment items and accuracy to provide optimal assessment for the measured object.
In addition to providing two types of doors, large and small, to ensure safety when setting or removing the workpiece to measure, its design allows workpieces to be set by using cranes and the like, considering workability. Furthermore, its electrical components, which are heat sources, are separated from the unit to minimize disturbance during measurement and achieve high precision.
|Measuring area (X × Y）||650mm × 450mm|
|Overall accuracy||0.6μm (※1)|
|Measuring head||Non-contact laser stylus, Electric micrometer|
|Minimum data interval||1μm|
|Scanning speed||0.5 ～ 50mm/sec|
|Scanning Guide way||Ceramics air slider|
|Drive system||“X：Linear Servo motor|
|Maximum Work weight||40kg|
|Dimension||W1820mm × D1200mm × H1550mm|
|Power requirement||AC200V (50/60Hz) 15A|
|Compressed air requirement||Clean and dry air 0.5MPa|
|Air consumption||100L/min (ANR)|
|Maximum work height||50mm|
|Installation environment||“Ambient temperature: 20ºC to 25ºC (keep temperature fluctuation within 1ºC)|
|Floor strength: Load capacity of 9||800N/m2 or more”|