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For measurement and analize of surface formingSurface and Flatness Measuring systems for Large Discs 700FR

High-precision flatness measurement of ceramic plates and the like
This series incorporates a rotary air table and is capable of measuring the surface profile of ceramics plates for wafer polishing and disks of up to Φ 700 mm, such as lapping tables etc.
Software for various measurements such as concentric circle measurements for in-depth evaluation and radial measurement for outline evaluation is availabele.

Performance / Specifications

NANOMETRO 700FR
Measuring area φ700mm(max.)
Overall accuracy 0.4µm
Repeatability 0.05µm(σ)
Display resolution 0.01µm
Measuring head Electric micrometer
Max. scanning speed (X axis) 35mm/s
Guide way X : Ceramics air guide
ϴ : Air bearing
Drive system X : Linear motor
ϴ : Servo motor
Maximum work mass 60kg
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