Measurement and analysis of surface formingSurface and Flatness Measuring systems for Large Discs 700FR

This series incorporates a rotary air table and is capable of measuring the surface profile of ceramics plates for wafer polishing and disks of up to Φ 700 mm, such as lapping tables etc.
Software for various measurements such as concentric circle measurements for in-depth evaluation and radial measurement for outline evaluation is availabele.