Process control of films and Chuck flatness control
Horizontal rotary, vacuum chuck type flatness/SORI measuring system for Φ300 wafers.
Minimum edge exclusion is 1mm, and precision autmoatic
measurement by cassette-to-cassette system can be accomplished.
Display and analysis
Performance / Specifications
|Measuring head||Non-contact laser stylus|
|Measuring method||Horizontal rotary table type|