NANOMETRO® F series
High-precision surface profile measurement of wafers, glass plates for FPD, and the like
Incorporating a high stiffness precision air stage, thes series can measure the surface profile of large-sized components, such as wafers, glass substrate for FPD, large-sized ceramics surface plate, etc. with a high degree of accuracy.
Various data outputs including analysis evaluation of surface profile to evaluation of surface roughness level are available by simple operation.
Data Download
Performance / Specifications
| Model |
NANOMETRO 110F |
NANOMETRO 330F |
NANOMETRO 750F |
|---|---|---|---|
| Measuring area |
X:100mm Y:100mm |
X:300mm Y:300mm |
X:700mm Y:500mm |
| Overall accuracy | 0.4μm | 0.6μm | |
| Repeatability | 0.05μm(σ) | 0.1μm(σ) | |
| Display resolution | 0.01μm | ||
| Measuring head | Non-contact laser stylus | ||
| Minimum data interval | 1μm | ||
| Scanning speed | 0.5~30mm/s | ||
| Guide way | Air slider | Ceramics air guide | |
| Drive system | XY : Servo motor |
X : Linear motor Y : Servo motor |
|
| Maximum work mass | 4kg | 50kg | 50kg |
