NANOMETRO® F series
High-precision surface profile measurement of wafers, glass plates for FPD, and the like
Incorporating a high stiffness precision air stage, thes series can measure the surface profile of large-sized components, such as wafers, glass substrate for FPD, large-sized ceramics surface plate, etc. with a high degree of accuracy.
Various data outputs including analysis evaluation of surface profile to evaluation of surface roughness level are available by simple operation.
Performance / Specifications
|Measuring head||Non-contact laser stylus|
|Minimum data interval||1μm|
|Guide way||Air slider||Ceramics air guide|
|Drive system||XY : Servo motor||
X : Linear motor
Y : Servo motor
|Maximum work mass||4kg||50kg||50kg|