NANOMETRO® FR series
High-precision flatness measurement of ceramic plates and the like
This series incorporates a rotary air table and is capable of measuring the surface profile of ceramics plates for wafer polishing and disks of up to Φ 1000 mm, such as lapping tables etc.
Software for various measurements such as concentric circle measurements for in-depth evaluation and radial measurement for outline evaluation is availabele.
Performance / Specifications
|Measuring head||Electric micrometer|
|Max. scanning speed (X axis)||35mm/s|
X : Ceramics air guide
ϴ : Air bearing
X : Linear motor
ϴ : Servo motor
|Maximum work mass||60kg||80kg|