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Measres the surface profile, back surface profile, flatness and thickness of Photo mask Substrates for Producing LCDs.

Each axis uses high stiffness air slider.
High precision evaluation of large area KURODA offers customized measuring range, software, etc. depending to user's needs.

Data Download

Performance / Specifications

Max. Measuring area


*Please contact us.

Scanning speed 200mm/s
Guide way

X : Ceramics air slider

Y : Air slider and Ball Screw

Drive system

X : Linear motor

Y : Servo motor

Measuring head Non-contact laser stylus
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