NANOMETRO® TT series
Surface and back shape and flatness inspection at the same time!
This series is vertical rotary, edge-grip type wafer flatness measuring system.
Minimum edge exclusion is 1mm, and high precision automatic measurement by cassette-to-cassette system can be accomplished.
Evaluation items conform to SEMI standards.
Series:
300TT-A
300TT-FA
200TT-A
Data Download
Features
- Example of flatness measurement
- Edge exclusion 1mm
- Edge exclusion 3mm
- Radial measurement data
- Edge roll-off analysis
- Edge profile bird's-eye view and sectional figure
KURODA offers analysis software that meets customer'sneeds on the basis of radial measurement results obtained by simultaneous measurement of the front surface and back surface.
Performance / Specifications
| Model | NANOMETRO 300TT | NANOMETRO 200TT |
|---|---|---|
| Measuring area | φ300mm | φ200mm |
| Display resolution | 1nm | |
| Measuring head | Non-contact laser stylus | |
| Measuring method | Vertical rotary table type | |
