Link for moving at page.

NANOMETRO® TT series

Surface and back shape and flatness inspection at the same time!

This series is vertical rotary, edge-grip type wafer flatness measuring system.
Minimum edge exclusion is 1mm, and high precision automatic measurement by cassette-to-cassette system can be accomplished.
Evaluation items conform to SEMI standards.

Series:
300TT-A
300TT-FA
200TT-A

Data Download

Features

  • Example of flatness measurement

nanometro_TT_feature_001.gif

  • Edge exclusion 1mm

nanometro_TT_feature_002.gif

  • Edge exclusion 3mm

nanometro_TT_feature_003.gif

  • Radial measurement data

nanometro_TT_feature_004.gif

  • Edge roll-off analysis

nanometro_TT_feature_005.gif

  • Edge profile bird's-eye view and sectional figure

nanometro_TT_feature_006.gif


KURODA offers analysis software that meets customer'sneeds on the basis of radial measurement results obtained by simultaneous measurement of the front surface and back surface.

Performance / Specifications

ModelNANOMETRO 300TTNANOMETRO 200TT
Measuring area φ300mm φ200mm
Display resolution 1mm
Measuring head Non-contact laser stylus
Measuring method Vertical rotary table type
To page top.

End of the page.