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NANOMETRO® F series

High-precision surface profile measurement of wafers, glass plates for FPD, and the like

Incorporating a high stiffness precision air stage, thes series can measure the surface profile of large-sized components, such as wafers, glass substrate for FPD, large-sized ceramics surface plate, etc. with a high degree of accuracy.
Various data outputs including analysis evaluation of surface profile to evaluation of surface roughness level are available by simple operation.

Data Download

Performance / Specifications

Model

NANOMETRO

110F

NANOMETRO

300F

NANOMETRO

750F

Measuring area

X:100mm

Y:100mm

X:300mm

Y:300mm

X:700mm

Y:500mm

Overall accuracy 0.4μm 0.6μm
Repeatability 0.05μm(σ) 0.1μm(σ)
Display resolution 0.01μm
Measuring head Non-contact laser stylus
Minimum data interval 1μm
Scanning speed 0.5~30mm/s
Guide way Air slider Ceramics air guide
Drive system XY : Servo motor

X : Linear motor

Y : Servo motor

Maximum work mass 4kg 50kg 50kg
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