NANOMETRO® 300PT
Process control of films and Chuck flatness control
Horizontal rotary, vacuum chuck type flatness/SORI measuring system for Φ300 wafers.
Minimum edge exclusion is 1mm, and precision autmoatic
measurement by cassette-to-cassette system can be accomplished.
Data Download
Features
Display and analysis
Performance / Specifications
| Measuring area | φ300mm |
|---|---|
| Display resolution | 10nm |
| Measuring head | Non-contact laser stylus |
| Measuring method | Horizontal rotary table type |
